Author:
Shemakhin A Yu,Zheltukhin V S,Shemakhin E Yu,Terentev T N,Sofronitsky A O
Abstract
Abstract
A diagram and description of an experimental setup for studying the properties of a stream of RF plasma at low pressure are presented. The setup is equipped with diagnostic devices that record the temperature, volt-ampere characteristics, and pressure in the chamber.
Subject
General Physics and Astronomy
Cited by
14 articles.
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