High-Bandwidth Dynamic Full-Field Profilometry for Nano-Scale Characterization of MEMS
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/48/i=1/a=197/pdf
Reference4 articles.
1. Materials issues in microelectromechanical systems (MEMS)
2. Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends
3. AFM characterization of out-of-plane high frequency microresonators
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3. Dynamic Surface Profilometry and Resonant-Mode Detection for Microstructure Characterization Using Nonconventional Stroboscopic Interferometry;IEEE Transactions on Industrial Electronics;2010-03
4. Capturing higher modes of vibration of micromachined resonators;Journal of Physics: Conference Series;2009-08-01
5. A measurement procedure of technology-related model parameters for enhanced RF-MEMS design;2009 IEEE International Workshop on Advanced Methods for Uncertainty Estimation in Measurement;2009-07
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