Author:
Baumann X,Teulet Ph,Cressault Y,Bultel A
Abstract
Abstract
This work is devoted to the study and comparison of theories to calculate densities of chemical species in a SF6 plasma in thermal non equilibrium conditions. The limits of the 2T law of mass action are shown. Then, the reaction rates are studied for several types of processes and they are implemented in a chemical kinetic model to acess the composition of the plasma. Finally, a comparison with the densities obtained with the law of mass action is performed and the results are discussed.
Subject
General Physics and Astronomy
Reference18 articles.
1. Thermal plasma modelling;Gleizes;J. Phys. Appl. Phys.,2005
2. Treatment of non-equilibrium phenomena in thermal plasma flows;Rat;J. Phys. Appl. Phys.,2008
3. Chemical equilibrium in complex mixtures;White;J. Chem. Phys.,1958
4. A robust and efficient method for the computation of equilibrium composition in gaseous mixtures;Godin;Plasma Chem. Plasma Process,2004
5. Recombination between electrons and atomic ions. I. Optically thin plasmas;Bates,1962