The growth of hexagonal and cubic GaN on a nano-patterned Si(100) substrate

Abstract

Abstract The results of studies of semipolar GaN(10-12) layers synthesized on a nano-patterned Si(100) substrate are presented. It is shown that in the method metalorganic vapor phase epitaxy, the use of a nanorelief consisting of V-shape groove with inclined faces close to the Si(111) plane can lead to the formation of regions of cubic gallium nitride in the nano-groove. Model of the origin of the cubic phase are based on the formation of AlN nuclei in (0001) and (10-10) nano-groove and the conjugation of the AlN(10-10) and c-GaN planes by the “magic mismatch” mechanism.