The effect of electrochemical oxidation time on the surface morphology of oxidized indium phosphide

Abstract

Abstract The surface features of oxide layers (< 100nm) grown on single-crystal n-InP (100) samples in acid electrolyte on initial stage were investigated by atomic force and lateral force microscopy. The time of electrochemical oxidation of samples was the variable parameter. There is difference found in the oxide layer phase structure grown in the electrolyte during different time. The initially formed (17 s) islands (a nucleated oxide phase) were divided, then coalescence appeared (26 s), and the occurrence of a second phase was detected. With an increase in the time (40 s) of oxidation, the surface morphology becomes more uniform.