Reflectivity of Different Texturing Structures Fabricated by Femtosecond Laser Etching

Abstract

Abstract Femtosecond laser etching is applied to fabricate cylindrical, quadrangular and circular hole micro-structures to explore the variation patterns of their reflectivity. The results show that the cylindrical and quadrangular texturing structures have the optimal anti-reflection effect (the reflectivity is always below 6%) in the wavelength range of 350-1000 nm, which is of reference value for the study of fabricating low-reflectivity texturing on monocrystalline silicon surfaces.