Magnetron sputtering system with reactive plasma assisting for deposition of TixZr1 -xO2 coating resistant to laser radiation

Abstract

Abstract The magnetron sputtering system with reactive oxygen plasma assisting for deposition of Ti x Zr1- x O2 nanocomposite coatings by sputtering a single Ti-Zr target and the results of study of the stability of these coatings to the action of high-power laser radiation are presented. The periodically repeated sequential processes of applying sputtered material onto a substrate and oxidation of the deposited material have been realized for obtaining the optical coating with resistance to the 960 W/cm2 laser radiation.