Author:
Khrushchov M M,Marchenko E A,Antonova O S,Atamanov M V,Petrzhik M I,Sulandziga D A
Abstract
Abstract
The composition, micromechanical properties and tribological behavior of silicon-based coatings obtained by reactive magnetron sputtering of silicon have been investigated. The results of the friction fatigue tests and the peculiarities of the friction surface failure in several types of vapor-deposited silicon-based coatings have been discussed.
Subject
General Physics and Astronomy