Design method of sensors for quantitative mechanical testing of nanomaterials in transmission electron microscopy

Abstract

Abstract Material structure at atomic scale determines its macroscopic physical and chemical properties. Transmission electron microscopy, as an effective and important technique for analyzing the microstructure of materials at atomic scale, has become an indispensable tool for studying the relationship between material properties and microstructure. According to the structure characteristics and working mode of transmission electron microscope, a design method of mechanical sensor based on piezoresistors is presented in this paper. The sensor can be used for in-situ quantitative tensile test in transmission electron microscope.