Design of High-Precision Micro-Capacitance Detection System

Abstract

Abstract The focus of this paper is on the development of micro-displacement measurement system of Beam Steering Mechanism (BSM) and Fast Sweeping Mirror (FSM) using in space remote sensor. The main objective is to design a micro-capacitance measuring technology based on Pcap01. In the proposed approach, first, the principle of capacitance measurement and the design of hardware and software of the system are introduced; then, the system is implemented to high-precision results below 3.5nF. The experiment results show that under the 1KHz output data rate, the system can achieve a resolution of 1.4fF in the range of 1pF~30pF, which can meet the system requirements of range and accuracy ratio of 20000.