Simulation of Flexible Dual-mode Surface Acoustic Wave Resonator for Strain Sensor Application

Abstract

Abstract Based on the requirement of flexible electronic devices (FED)such as surface acoustic wave (SAW) sensors, finite element models for material analysis and SAW resonator design were established. Dual-mode of Rayleigh and Horizontal Shear mode on 0ºY cut LiNbO3 thin film was discovered. The influence of BCB thickness and PI substrate on resonant mode was analyzed. The flexible SAW resonator owned high sensitivity both in Rayleigh mode and Horizontal shear mode under tensile stress and compressive stress by simulation.