The Effect of Working Gases Mixing Ratios on the Synthesis and Characteristics of TiO2/SiO2 Nanocomposite via Closed-Field unbalanced DC Magnetron Co-Sputtering Technique

Abstract

Abstract The objective of this research is to study the influence of deposition parameters such as gases mixing ratio O2/Ar on the structural and optical properties of the TiO2/SiO2 nanocomposite films synthesized using closed field unbalanced dc magnetron co-sputtering technique. The nanocomposite thin films were characterized using x-ray diffraction (XRD) to determine the phase structure, and Fourier transform infrared (FTIR) spectroscopy to investigate Si-O-Si, Ti-O and Si–O–Ti. functional groups. The UV-VIS. absorption spectra of the synthesized films reveal that the indirect energy band gap was found to be 2.75 eV. The mixing ratio of Oxygen and Argon (O2/Ar) gases has a pronounced controlling effect on the structural and optical properties of such nanocomposite.