Author:
Strunin V I,Khudaibergenov Zh G
Abstract
Abstract
Plasma-chemical model of magnetron discharge is described. The model allows you to predict the densities of the main plasma components. As a result of numerical modeling, it was found that dissociation of N2
ranges from 10% to 30% with an increase in plasma power, the degree of dissociation increases. The addition of N2
to the plasma leads to a decrease in ion density due to energy consumption for non-ionizing molecular collisions. It can be assumed that aluminum nitride is deposited on the surface of a substrate with a high flow of metal ions in combination with a stream of neutral molecules N2 with a low adhesion coefficient and a relatively small flow of nitrogen ions.
Subject
General Physics and Astronomy
Cited by
1 articles.
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