Comparative analysis of electrophysical properties of ceramic tantalum pentoxide coatings, deposited by electron beam evaporation and magnetron sputtering methods-Reference-Cited by-同舟云学术

Comparative analysis of electrophysical properties of ceramic tantalum pentoxide coatings, deposited by electron beam evaporation and magnetron sputtering methods

Published:2014-12-03 Issue: Volume:558 Page:012036
ISSN:1742-6588
Container-title:Journal of Physics: Conference Series
language:
Short-container-title:J. Phys.: Conf. Ser.

Author:

Donkov N,Mateev E,Safonov V,Zykova A,Yakovin S,Kolesnikov D,Sudzhanskaya I,Goncharov I,Georgieva V

Publisher

IOP Publishing

Subject

General Physics and Astronomy

Link

http://stacks.iop.org/1742-6596/558/i=1/a=012036/pdf

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