Resonance and sensing characteristics of quartz tuning fork for force sensor

Abstract

Abstract Quartz tuning fork (QTF) is often utilised for the design and manufacture of high-performance sensors, such as the force sensor for atomic force microscopy (AFM). In this study, the mechanical resonance and sensing characteristics of QTF with an additional mass on its prongs are studied by theoretical analysis and experiments. The results show that the position and size of additional mass on the QTF prong have an obvious influence on its resonance frequency and quality factor (Q-factor). The greater the mass of the additional component or the closer to the free end of the QTF prong is, the lower its resonance frequency and quality factor will become. Reducing the additional effective mass can significantly improve its quality factor, thus improving the sensing performance of the QTF sensor. This study can provide a quantitative reference for the design and optimisation of the QTF force sensor for AFM.