Design of Ion Implantation and Deposition Signal Generator Based on FPGA and Touch Screen

Abstract

Abstract In order to improve the operation precision of ion implantation and deposition signal generator, to fix its arithmetic error and reach 1μs as the pulse adjustment unit, use FPGA and touch screen technology to improve the performance of signal generator. On the one hand, the FPGA board can directly affect the FPGA chip through Verilog to reduce the program operation time, on the other hand, replacing with crystal oscillator with higher frequency can make the program run faster and minimize the arithmetic error. The combination of FPGA and crystal oscillator can easily realize the clock input of MHz level and output pulse with 1μs as the adjustment unit, which has already been applied to signal generator as signal output source.