Author:
Su Xuebing,Wang Yang,Jin Xiangliang,Yang Hongjiao
Abstract
Abstract
The Dual-Direction Silicon Controlled Rectifier (DDSCR) device has dual-direction electrostatic protection function and strong current discharging ability, which is widely used in ESD on-chip protection. In this paper, a high performance symmetric high voltage Dual-Direction Silicon Controlled Rectifier with floating P+ (HVDDSCR_FP+) is designed for CAN bus under 0.18 μm BCD process. In order to predict and verify the ESD performance of the device, TCAD two-dimensional device simulation and Transmission Line Pulse (TLP) test system were used. The experimental results show that the HVDDSCR_FP + structure has not only symmetrical positive and reverse I-V curves, but also the characteristics of high holding voltage and high failure current. Compared with the traditional HVDDSCR, HVDDSCR_FP+, at 25V forward and reverse trigger voltages (Vt), has increased its holding voltage (Vh) from 12V to 20V, failure current (It2) from 5A to 35A. In the actual tape-out process, it is found that the width of the N-well has a great influence on the performance of the device. After analyzing the reason and improving it, the leakage current of the device is reduced from μA level to nA level.
Subject
General Physics and Astronomy
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