The effects of post heat treatment on ITO/AgAl/ITO/p-Si multilayer films

Author:

Isiyaku Aliyu Kabiru,Ali Ahmad Hadi,Nayan Nafarizal

Abstract

Abstract For the past few decades, the quest for an improve indium tin oxide (ITO) films have attracted a lot of interest by scientists and industries for application in advanced optoelectronic devices. ITO/AgAl/ITO multilayer films were deposited on p-silicon (Si) substrates at room temperature by radio frequency (RF) and direct current (DC) magnetron sputtering respectively. The effects of post-heat (annealing) treatment on the structural, optical and electrical properties of the ITO/AgAl/ITO multilayer films were investigated at different temperature of 200 °C, 300 °C, 400 °C and 500 °C respectively. X-ray diffraction (XRD) results reveal an amorphous structure for the as-deposited film whereas the post annealed films show a polycrystalline and cubic bixbyite structure with preferential peaks orientation along ITO (222), Ag (111), and ITO (440) crystalline directions. Atomic force microscopy (AFM) analysis indicates a smoother surface morphology and improved grain size after post heat treatment. Ultraviolet-visible spectrophotometer measurements show a significant increase in optical transmittance spectra as the annealing temperature increases. Maximum transmittance peak of 87.2 % was obtained by film annealed at 500 °C. Four-point probe measurements exhibit a substantial decrease in sheet resistance with respect to increasing post-annealing temperature. The sheet resistance of the as-deposited film is about 7.85 Ω/sq and falls down to 3.23 Ω/sq as the post-heat temperature is increased to 500 °C. Compared to as-deposited film, the post annealed multilayer films optical and electrical properties have been successfully enhanced, fine turned and favourable for Si solar cell application.

Publisher

IOP Publishing

Subject

General Physics and Astronomy

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