Performance-increasing technique in micromechanical accelerometer development

Abstract

Abstract Requirements for higher-performance on-board control systems and instruments applied in a variety of small-scale moving objects results in the necessity to develop micromechanical sensors – small, lightweight, energy-efficient and, at the same time, offering high-reliability performance and easy-to-use. Development of such MEMS will require – in its turn – controlling parameters which determine the quality of the sensor. These strictly-controlled parameters will most immediately influence the desired outcomes and underlie more efficient use of resources to achieve the desired aims. The problem discussed has already been studied by many scientists. MEMS have been and are being developed by both Russia-based and foreign companies like Honeywell International Inc., Analog Devices Inc., JSC Radar MMS, Temp-Avia plc., to name a few.