Characteristics of probing electrons behavior inside the chamber of scanning electron microscope

Abstract

Abstract The electron mirror phenomenon has been explored to describe the behavior of a probing electron trajectory inside the chamber of scanning electron microscope (SEM). This investigation has been carried out by means of the modulated mirror plot curve technique. This method is based on expanding sample potential to a multipolar form to detect the actual distribution of the trapped charges. Actually an experimental result is used to guiding results of this work toward the accurate side. Results have shown that the influence of each type of multipolar arrangement (monopole, dipole, quadruple, octopole … etc.) mainly depends on the driving potential.