Investigation of a compact model for squeeze-film air damping in the free molecular regime

Abstract

Abstract Due to the huge computational cost, the Monte Carlo (MC) model is difficult to use to predict squeeze-film air damping in the free molecular regime. Sumali (2007) proposed an empirical compact formula relating MC model and the analytical energy transfer model (ETM) by fitting two curves. By using the efficient numerical model, this paper discusses the application of the compact formula for squeeze-film air damping of different microplate sizes in the free molecular regime. The results show that, for plates of various sizes, the quality factors predicted by the compact model match well with those predicted by the numerical model. The work of this paper has validated that the compact model for squeeze-film air damping proposed by Sumali (2007) can be used for plates of various sizes.