Author:
Kaleel Souad G,Suhail Mahdi H,Kamil Hawraa
Abstract
Abstract
In this study, a double frequency Nd: YAG deposited by Pulsed Laser Deposition (laser beam 1064 nm, 6 Hz repetition rate and 10 ns pulse duration) were used for a thin Cr2O3 deposit on glass substrate. Many growth parameters have been considered to specify the optimum condition, namely substrate temperature at room temperature, oxygen pressure (2.8×10-4 mbar), laser energy (600) mJ and the number of laser shots was 500 pulses. The thickness was of about 160 nm and annealing temperature at (300, 400 and 500) °C. Using DC method, the conductivity and Hall coefficient of Cr2O3 films were measured. The sensing properties of the p-type (Hall coefficient was positive) films for NO2 gas have been studied, and the result revealed that the Cr2O3 films have low sensitivity at room temperature, and it’s improved by increasing the annealing temperature to 500° C.
Subject
General Physics and Astronomy
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