Structure of tantalum coatings on NiTi substrate deposited by magnetron sputtering

Abstract

Abstract The paper provides the results of studies of the structural-phase state of tantalum coatings prepared by magnetron deposition. The coatings were deposited on substrates made of titanium nickelide with a shape memory. The NiTi temperature during coating deposition did not exceed 100 °C. The structural-phase state of Ta was determined by X-ray diffraction at different stages of coating formation. It has been shown that at the initial stage of deposition, two-phase coatings (α- and β-Ta) are formed. The synthesis of the coating from Ta leads to the growth of interplanar distance of the B2 austenite phase in the crystallographic direction (100). The growth of interplanar spacing is caused by formation of microstresses during interaction with incident tantalum ions. The lattice parameters of the B19 ‘phase, responsible for appearance of the shape memory effect, do not change during deposition of the tantalum coating.