The influence of the zirconium sublayer thickness on the surface microstructure of the magnetron ZrN coatings

Abstract

Abstract The results of investigations the microstructure of ZrN coating with a thickness of about 3 μm obtained magnetron sputtering, are presented. The difference of the coatings is in the thickness of the zirconium underlayer: 250, 560 and 750 nm. The surface microstructure was investigated by profilometry, scanning electron microscopy (SEM) and atomic force microscopy (AFM). The dependences in a grain size, a roughness, the number and size of microparticles of the coating on the underlayer thickness are established. The mechanical characteristics of the coatings (microhardness and elasticity modulus) are determined.