Design, Simulation and Fabrication of A MEMS-based Double-layer Spiral Planar Inductor with Patterned Permalloy as Magnetic Layers-Reference-Cited by-同舟云学术

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Design, Simulation and Fabrication of A MEMS-based Double-layer Spiral Planar Inductor with Patterned Permalloy as Magnetic Layers

Published:2018-03 Issue: Volume:986 Page:012036
ISSN:1742-6588
Container-title:Journal of Physics: Conference Series
language:
Short-container-title:J. Phys.: Conf. Ser.

Author:

Zhu Xiaomin,Cheng Ping,Chen Mingming,Ding Guifu

Publisher

IOP Publishing

Subject

General Physics and Astronomy

Link

http://stacks.iop.org/1742-6596/986/i=1/a=012036/pdf

Reference11 articles.

1. Permalloy Patterning Effects on RF Inductors

2. Comparison of the effects of 60 nm and 96 nm thick patterned permalloy thin films on the performance of on-chip spiral inductors

3. Design, fabrication and characterization of thin power inductors with multilayered ferromagnetic-polymer composite structures

4. Planar inductor with ferrite layers for DC-DC converter

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A micro-inductor with thin film magnetic core for a 20 MHz buck converter;Journal of Magnetism and Magnetic Materials;2021-04

2. An Improved F/C Structure for Cell-Scale Micro-Magnetic Coil;IEEE Transactions on Magnetics;2020-08

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