Study of the influence of substrate bias voltage on the texture of Nb coatings deposited on a Cu substrate

Abstract

Abstract The phase composition and texture of Nb coatings deposited using an inverted magnetron at voltages on the Cu substrate from 0 to –300 V were investigated by an X-ray method. With an increase in the voltage on the substrate, the thickness of the coating decreases from 9–10 μm at voltages up to –100 V and decreases to 2 μm at –250 V. The texture of the coatings varies non-monotonically from (110) to (111), while at high voltages on the substrate in the range from –250 to –300 V, the Nb coating is characterized by a textureless state.