Author:
Kozin A A,Shapovalov V I,Ahmedov H,Demir A,Korutlu B,Shabalin A E
Abstract
Abstract
In this work, thermal processes in direct current operating magnetron with hot titanium target are studied in Argon medium. Thermal processes are described by stationary, three-dimensional, heat equation with surface heat source which is the flux of argon ions from the gas discharge. The problem was solved numerically via the Heat Transfer Module in COMSOL Multiphysics Software.
Subject
General Physics and Astronomy