Reactive magnetron sputtering of TiN-Pb coatings using two metal targets

Abstract

Abstract One of the promising areas of application of the magnetron co-sputtering method using two separate targets in a reactive atmosphere is to increase the tribological properties of friction pairs by applying composite solid lubricant coatings consisting of a solid matrix and a soft lubricant. In this paper, we study the dependence of the parameters of TiN-Pb coatings obtained by co-spraying of separate Ti and Pb targets in a mixture of Ar and N gases on pressure. The factors that have a significant impact on the process of coating deposition were also determined.