Micro ECDM process comparison using different tool feed methods of constant gravity and spring-force

Abstract

Abstract Quartz glass has been widely used in multiple frontier fields of science and technology owing to its excellent chemical and mechanical properties, such as optical communication, semiconductor, photovoltaic power, and aerospace. ECDM (electrochemical discharge machining) is a non-traditional material removal process suitable for machining non-conductive materials of high hardness and brittleness. The tool electrode feed method is a key factor affecting the ECDM process. Experimental research was carried out for comparing the conventional gravity feed method and a newly-developed spring-force feed method. Micro tool electrodes of Φ150 µm were fabricated by combining the method of TF-WEDG (tangential feed-wire electrical discharge grinding) and reverse micro EDM (electrical discharge machining). Machined microstructures of blind holes, channels, squares, and patterns were compared by the gravity feed method and the spring-force feed method respectively. The experimental results show that the spring-force feed method can improve the micro ECDM process considering the aspects of dimensional accuracy, overcuts, deteriorated edges, surface topography, and tool wear.