An accurate measuring method for the internal jaw stiffness of deformable silicon arms

Abstract

The internal jaw stiffness of the silicon arm and its uniformity directly determine the geometric position of the clamped part, which in turn affects the geometric accuracy of the fusion target ball. The slight variation of the silicon arm jaw stiffness caused by machining errors is a crucial factor affecting the geometric accuracy of the micro-target. To accurately detect the variation of internal jaw stiffness caused by machining errors, this paper proposes a multi-point stiffness detection method combining micro-feed force application and high-precision image inspection. An experimental measurement device is also built to measure the jaw stiffness of the silicon arm sample. The proposed method, which can obtain the micro-deformation data of the internal jaws under small loads and accurately fit the stiffness, provides a new way to measure tiny, thin-walled, brittle cantilever beam structures.