Author:
Zhongyu Dou,Zhangfaguang ,Guoyinglu ,Chenshaobo
Abstract
Abstract
By using the method of doal-ion beam sputtering deposition, N element is injected with ions to assist sputtering deposition of TiC to prepare the TiC nano-coating with high binding strength. SEM, XRD, dynamic ultra-micro hardness tester, friction and wear testing machine were used to characterize and analyze TiC properties. The results show that the TiC coating prepared by double ion beam sputtering deposition has high hardness, high bonding strength, good friction and wear performance, and improves tool service life.
Subject
General Physics and Astronomy
Reference16 articles.
1. Surface Modification by Negative Ion Implantation [J];Ishikawa;Surface and Coatings Technology,2009
2. Application and Research Progress of ion implantation technology in surface modification of materials [J];Luo;Thermal Processing Technology,2008
3. Analysis and study on the microstructure of ion-implanted layer on TiN thin films [J];Guo;Physics test,2011
4. Friction and Wear Properties of Carbon - Ion Implanted Titanium Nitride Films [J];Mitsuo;Surface and Coatings Technology,2000
5. Wear Resistance of TiN Coatings Implanted With Al and N Ions [J];Narojczyk;Vacuum,2007
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献