Effect of Nonbonded Hydrogen on Structure and Properties of DLC Films

Abstract

Abstract a-C: H films were prepared on the surface of 316 L stainless steel, aluminum foil and single crystal silicon (100) waferby PE-CVD. The effect of nonbonded hydrogen on the thermal stability and properties of the films was discussed. The analysis results show that the H elements in this a-C: H film mainly exists as free states of H molecules or H atoms. The graphitization stage of the a-C: H films prepared in this experiment are obviously divided into two stages by the precipitation of non-bonded H 564°C. At the same time, the escape of non-bonded H significantly resulted in the release of internal stress and significantly promoted the second stage graphitization. Under the action of hydrogen evolution and graphitization, the microstructure of carbon film is rearranged and agglomerated in a certain direction.