Author:
Chen Shiyi,Nie Xiaoming,Tan Zhongqi,Zhang Bin
Abstract
Abstract
In order to better measure the surface processing quality of ultra-smooth optical substrates, an image acquisition system of laser scattering microscope is built based on the principle of microscopic dark-field scattering imaging, which can help acquire a substrate sample scattering image within 10 seconds. Various kinds of defects on the surface of the optical substrates can be observed, and in this way, the simple and qualitative analysis of the surface quality of the substrates is realized.
Subject
General Physics and Astronomy