Characteristics and properties of nanolayer hafnium based PVD coatings

Abstract

Abstract The paper presents an experimental study of the characteristics of a multilayer coating made of titanium and hafnium nitrides. The thickness of layers formed by the ion-plasma coating method was calculated. It was found that the biologically active coating based on titanium nitride and hafnium has a layered structure. The calculated layer thickness is in the range from 6 to 10 nm, the determined thickness is in the range from 10 to 20 nm. The topography of the coating surface contains intergranular boundaries that are reproduced as empty slits with a size of less than 5 nm. The transverse dimensions of the crystals can be estimated at 5-30 nm.