EEDF measurements in plasma expansion region of a high-frequency driven hydrogen discharge-Reference-Cited by-同舟云学术

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EEDF measurements in plasma expansion region of a high-frequency driven hydrogen discharge

Published:2007-04-01 Issue: Volume:63 Page:012013
ISSN:1742-6588
Container-title:Journal of Physics: Conference Series
language:
Short-container-title:J. Phys.: Conf. Ser.

Author:

Djermanova N,Kiss'ovski Zh,Lishev St,Tsankov Ts

Publisher

IOP Publishing

Subject

General Physics and Astronomy

Link

http://stacks.iop.org/1742-6596/63/i=1/a=012013/pdf

Reference13 articles.

1. Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma

2. Principles of Plasma Discharges and Materials Processing

3. Plasma-based ion beam sources

4. Development of a RF source for ITER NBI: First results with D− operation

5. Measurement of the electron energy distribution function by a Langmuir probe in an ITER-like hydrogen negative ion source

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Langmuir probe plasma parameters and kinetic rates in a Ar–SiH4–H2plasma during nc-Si films deposition for photovoltaic applications;Journal of Physics D: Applied Physics;2009-10-26

2. Expanding hydrogen plasmas: photodetachment-technique diagnostics;Plasma Physics and Controlled Fusion;2008-12-04

3. Two-dimensional fluid model of a two-chamber plasma source;Plasma Sources Science and Technology;2008-07-07

4. Laser photodetachment diagnostics of electronegative expanding plasmas;Journal of Physics: Conference Series;2008-05-01

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