Author:
Grzebyk T,Szyszka P,Górecka-Drzazga A,Dziuban J A
Abstract
Abstract
This work describes a construction, technology, working principle and properties of an ion source dedicated for a miniature MEMS mass spectrometer. It has been examined under what conditions it is possible to ionize gas sample, and to obtain a properly directed ion beam. The influence of such parameters as shapes, dimensions and distances between the electrodes, as well as the value of an applied magnetic and electric field and pressure level on the operation of the instrument have been investigated. The experiment allowed for choosing the optimal parameters, thus it seems that the ion source will fulfil all the requirements necessary for the MEMS mass spectrometer.
Subject
General Physics and Astronomy
Cited by
2 articles.
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1. The Sensor for H2 Content Measurements in Hydrogenated Gaseous Fuel;2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS);2023-12-11
2. MEMS Ion Optical Spectrometer for Methane Detection on Mars;2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS);2022-12-12