Experimental installation for study the low-power ICRF plasma at low pressures with equipment for experiment data synchronization-Reference-Cited by-同舟云学术

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Experimental installation for study the low-power ICRF plasma at low pressures with equipment for experiment data synchronization

Published:2022-05-01 Issue:1 Volume:2270 Page:012014
ISSN:1742-6588
Container-title:Journal of Physics: Conference Series
language:
Short-container-title:J. Phys.: Conf. Ser.

Author:

Terentev T N,Zheltukhin V S,Shemakhin A Yu,Nekrasov I K,Samsonova E S,Shemakhin E Yu,Tsokalo I E,Tyurin V A

Abstract

Abstract An installation for numerical and experimental studies of low-pressure radio frequency plasma for surface modification of functional materials with equipment for data synchronization are presented. The equipment for data synchronization as well as intermediate results for plasma generation are showed.

Publisher

IOP Publishing

Subject

General Physics and Astronomy

Link

https://iopscience.iop.org/article/10.1088/1742-6596/2270/1/012014/pdf

Reference6 articles.

1. Plasma generation and plasma sources;Conrads;Plasma Sources Sci. Technol.,2000

2. Capacitive coupled RF discharge: Modelling at the local statement of the problem;Badriev;J. Phys. Conf. Ser.,2017

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