Research on Bulk Acoustic Wave Resonator Based on Phononic Crystal

Abstract

Abstract With the continuous advancement of information technology and the rapid development of mobile communication technology, from smart home to automatic driving of cars, and then to the application and development of virtual reality, communication technology has evolved from the earliest communication between people to communication between things. The frequency band supported by smart phones and various small mobile terminals is increasing, and their communication frequency is also gradually increasing, which brings some challenges to the traditional RF front-end devices. The traditional RF filter can not meet the current market demand because of its own performance and size constraints. As the best option to integrate with RF circuit or microwave circuit, bulk acoustic wave filter has great development and application prospects in modern RF communication system. This paper will focus on the solid-state assembled resonators based on one-dimensional and two-dimensional phononic crystals, analyze the influence and change law of the performance of bulk acoustic wave devices based on two-dimensional phononic crystals, then explore the main loss mechanism existing in solid-state assembled devices, and propose improvement schemes, which lays a foundation for the application of solid-state assembled resonators in today’s RF front-end.