Comparative investigation of Zr-Mo-Si-B thin films using picoindener module and nanohardness tester

Abstract

Abstract Zr–Mo-Si-B coatings were successfully deposited using non-reactive magnetron sputtering of ceramic ZrMoSiB target. Structural investigations have been carried out using X-ray diffraction analysis, high-resolution transmission and scanning electron microscopy, glow-discharge optical-emission, and energy-dispersive spectroscopy. The coatings were subjected to the indentation using nanohardness-tester and picoindenter module placed in the column of transmission electron microscope. The obtained results show that the coatings consist of hcp-ZrB2 phase with needle crystallites 5-10 nm in diameter elongated in the direction of growth. The coatings demonstrated relatively high mechanical properties and recordable elastic recovery up to 84%. Results of indentation tests exhibited the close results.