Explosive vaporization of two- and three component liquid mixtures on microheater

Abstract

Abstract The explosive vaporization of two-component mixtures of ethanol-water and three-component mixtures of acetone-ethanol-water during pulse thermal loads on the microheater during isobaric heating has been investigated. Microheater fabricated using MEMS technology presents the multilayer thin-film structure with the central Ta-Al layer heated by pulse electric current. The optical method based on measuring the laser intensity reflected from resistor surface recorded the characteristics of explosive vaporization. The dependence of the temperature of nucleation and the time of explosive vaporization on the rate of temperature growth and heat flux density are obtained.