Research on chamfer structure effects for the microforce measuring device output

Abstract

Abstract The influence of chamfer structure on microforce measuring device output has been researched by theoretical calculation and numerical simulation. The relationship between the chamfer dimensions and the microforce output was analysed under different parameters such as electrode intersection length and electrode spacing. Based on the analysis of the electric field distribution of the capacitive microforce device, the mechanism of improving the device output performance with chamfer had been obtained. The results show that the influence of the chamfer was not obvious when the electrode gap was large. With the decrease in the electrode gap, the chamfer could effectively improve the electric field distribution between the electrodes, so as to form a section insensitive to the electrode intersection length. In this region, even if the intersection length changed greatly, the device could still produce a very stable microforce. This research could be used as a guide to improve the accuracy and stability of microforce measuring devices.