Study of silicon nitride O-ring resonator for gas-sensing applications-Reference-Cited by-同舟云学术

Study of silicon nitride O-ring resonator for gas-sensing applications

Published:2020-12-01 Issue:1 Volume:1695 Page:012124
ISSN:1742-6588
Container-title:Journal of Physics: Conference Series
language:
Short-container-title:J. Phys.: Conf. Ser.

Author:

Elmanova A,An P,Kovalyuk V,Golikov A,Elmanov I,Goltsman G

Abstract

Abstract In this work, we experimentally studied the influence of different gaseous surroundings on silicon nitride O-ring resonator transmission. We compared the obtained results with numerical calculations and theoretical analysis and found a good agreement between them. Our results have a great potential for gas sensing applications, where a compact footprint and high efficiency are desired simultaneously.

Publisher

IOP Publishing

Subject

General Physics and Astronomy

Link

https://iopscience.iop.org/article/10.1088/1742-6596/1695/1/012124/pdf

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