Author:
Klimin V S,Rezvan A A,Morozova J V,Ageev O A
Abstract
Abstract
Consider formation of nickel catalytic centers from atomic flows obtained by the method of vacuum resistive evaporation. A model of formation kinetics of catalytic centers of nickel from atomic flows has been constructed. A complete model of theoretical studies of the formation of catalytic centers of nickel on a silicon surface is shown. A dependence of cluster concentration on normalized formation time is obtained. According to the results of theoretical studies, it was learned that flux of nickel atoms to substrate is F = 1.296 * 1018, residence time of nickel atom on substrate in adsorbed state is tg = 5.135 * 10−7, and concentration of adsorbed atoms as a function of time is N = 6.657 * 1011.
Subject
General Physics and Astronomy