Author:
Lubenchenko A V,Lukyantsev D S,Pavolotsky A B,Ivanov D A,Lubenchenko O I,Ivanova I V,Iachuk V A,Pavlov O N
Abstract
Abstract
A method of controlled generation of metal suboxide films is proposed, basing on low-current ion sputtering of native oxides of ultra-thin metallic films and XPS chemical and phase depth profiling. Niobium suboxide ultra-thin films are generated and controlled using this approach.
Subject
General Physics and Astronomy