Author:
Lysenko I E,Naumenko D V,Ezhova O A
Abstract
Abstract
This paper presents new design torsion suspension of MEMS z-axis accelerometer. These prototypes Z-axis accelerometer are based on pantograph lever structure is out-of-plane devices. The results of finite element analysis of the structure are presented.
Subject
General Physics and Astronomy
Cited by
1 articles.
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