A novel and simple fabrication method of embedded SU-8 micro channels by direct UV lithography
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/34/i=1/a=054/pdf
Reference6 articles.
1. Buried microchannels in photopolymer for delivering of solutions to neurons in a network
2. A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels
3. A novel fabrication method of embedded micro-channels by using SU-8 thick-film photoresists
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