Study on Surface Properties of Unalloyed Copper Implanted with Different Transition Metal ions

Abstract

Abstract Copper is widely used in Integrated Circuits and electronic components. Its corrosion performance and service performance have been paid much attention. We implanted Ti, Cr, Fe, Ni, Zn and other fourth period transition metal ions into unalloyed copper. After that, zeta potential test, electrochemical test and density functional theory calculation were used to study the surface properties of the implanted samples. We found that for copper samples, the zeta potential of implanted samples is related to the type of implanted transition metal ions, that is, the charge state at the solid-liquid interface is related to the type of implanted ions. We use density functional theory calculations to explain this change in surface properties of metal samples before and after ion implantation. We find that the d-band center of the transition metal has a similar trend to zeta potential.