Effect of morphology features of patterned surface on the nucleation processes of In/GaAs nanostructures during droplet epitaxy

Abstract

Abstract We present the results of theoretical studies of the self-organization processes of nanoscale metal In droplets on GaAs(001) substrates with artificial structural heterogeneities of various types – with a rectangular, trapezoidal, and triangular shapes. The study showed that to improve the accuracy of nanostructure positioning and homogeneity, it is necessary to use patterns with triangular grooves. In order to ensure the full groove filling by the material and to suppress the undesirable structure formation outside modified areas, it is necessary to provide sufficient diffusion length of adatoms taking into account the peculiarities of the patterned surface morphology.