Application of an anti-emission coating of pyrolytic carbon to the grid electrodes of high-power electrovacuum devices by deposition from the gas phase in carbon plasma

Abstract

Abstract A technology for applying an anti-emission pyrocarbon coating by plasma-chemical gas-phase deposition to the grid electrodes of high-power electrovacuum devices has been developed. The plasma of a vacuum-arc discharge from a graphite cathode is simultaneously used for heating the grid electrodes, cleaning the grid electrodes from surface contamination, and for decomposing the reaction gas into active radicals. Experimental studies have shown that the satisfactory structure of the coatings and the adhesion of the coatings to the grid electrodes are provided at the temperature of the grid electrodes in the range from 550 to 1300 °C.