Low temperature plasma-assisted nitriding of austenitic steel in a ferromagnetic enhanced inductive discharge

Abstract

Abstract Plasma-assisted nitriding of austenitic stainless steel AISI 321 has been performed with the use of a ferromagnetic enhanced inductive discharge as the source of nitrogen ions and radicals, in the temperature range of 300–400°C, gas pressure of 50 mTorr and ion densities of about (2.5–7.7)·1010 cm−3. A significant increase in the nitriding rate was achieved, in comparison with a low temperature glow-discharge nitriding process. A possible mechanism of the nitriding rate increase is a high atomic nitrogen density achieved in the ferromagnetic enhanced inductively coupled plasma.